In general, you will be building and validating physical/optical models of the EUV optical system, which will be used to simulate and better understand the behavior of the real world systems. The work will begin with a survey of the current state-of-the-art models and relevant underlying physics. Next, you will generate and validate simulation models/code to imitate real system processes, such as a measurement of system power or throughput. In addition, you will design and perform sensitivity studies to map the complex relationships between physical processes within the source and the system performance. Working together with our team, you will also help build models/algorithms to efficiently extract relevant physical properties from real system measurements. For example, we may wish to extract plasma emission properties from a combination of system signals. Lastly, all results, code, and models will be documented and shared with relevant stakeholders.